发明名称 Apparatus and process for producing organic mono molecular or multilayer films
摘要 An apparatus and process for producing organic monomolecular or multilayer films continuously comprises a tank having a spreading region (S) for spreading a material to form a monomolecular film, a compression region (C) for compressing the material on the liquid surface to form the monomolecular film and a deposition region (D) where the monomolecular film is deposited on a substrate. Means is provided to cause liquid to flow continuously from the spreading region to the deposition region through the compression region. A first control means is provided to maintain the liquid level in the deposition region D at a predetermined level. A second control means is provided for regulating the surface pressure of the monomolecular film at a predetermined value. Fluid flow through the apparatus is regulated so that the thickness of the liquid flow in the region C is less than thickness of the liquid flow in the regions S and D, and a decoupling region DS is provided between the region S and the region C. The provision of the decoupling region DS permits more stable film production.
申请公布号 US5599589(A) 申请公布日期 1997.02.04
申请号 US19950423697 申请日期 1995.04.18
申请人 CANON KABUSHIKI KAISHA 发明人 ALBRECHT, OTTO;MATSUDA, HIROSHI
分类号 G03C1/74;B01J19/00;B05C3/09;B05D1/20;(IPC1-7):B05D1/20;B05C3/02 主分类号 G03C1/74
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