发明名称 |
Apparatus and process for producing organic mono molecular or multilayer films |
摘要 |
An apparatus and process for producing organic monomolecular or multilayer films continuously comprises a tank having a spreading region (S) for spreading a material to form a monomolecular film, a compression region (C) for compressing the material on the liquid surface to form the monomolecular film and a deposition region (D) where the monomolecular film is deposited on a substrate. Means is provided to cause liquid to flow continuously from the spreading region to the deposition region through the compression region. A first control means is provided to maintain the liquid level in the deposition region D at a predetermined level. A second control means is provided for regulating the surface pressure of the monomolecular film at a predetermined value. Fluid flow through the apparatus is regulated so that the thickness of the liquid flow in the region C is less than thickness of the liquid flow in the regions S and D, and a decoupling region DS is provided between the region S and the region C. The provision of the decoupling region DS permits more stable film production.
|
申请公布号 |
US5599589(A) |
申请公布日期 |
1997.02.04 |
申请号 |
US19950423697 |
申请日期 |
1995.04.18 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
ALBRECHT, OTTO;MATSUDA, HIROSHI |
分类号 |
G03C1/74;B01J19/00;B05C3/09;B05D1/20;(IPC1-7):B05D1/20;B05C3/02 |
主分类号 |
G03C1/74 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|