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发明名称
SMALL-SIZED SPUTTERING TARGET AND LOW-PRESSURE SPUTTERING DEVICE USING THE SAME
摘要
申请公布号
JPH0931637(A)
申请公布日期
1997.02.04
申请号
JP19950178822
申请日期
1995.07.14
申请人
ULVAC JAPAN LTD
发明人
OBINATA HISAHARU
分类号
C23C14/34;C23C14/35;H01L21/203;H01L21/285;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
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地址
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