METHOD FOR APPLYING AND CURING COATING SOLUTION, PRODUCTION OF COLOR FILTER AND DEVICES THEREFOR

摘要

PROBLEM TO BE SOLVED: To obtain a high-quality film-coating material without any defect due to nonuniformity in temp. at the time of curing a coating soln. by applying the soln. on the central part of the substrate except the outer end, then drying the soln. under reduced pressure and curing the soln. by heating. SOLUTION: A glass substrate 80 is fixed on a stage 16 in a coating part 10 and transferred on a slide rail 17. Meanwhile, the coating soln. is supplied between a metal roll 12 and a knife roll 13 to form a coating soln. reservoir 15. A scraper 14 is attached to the metal roll 12 to supply a specified amt. of the coating soln. on the surface of a coating roll 11, and the soln. applied on the substrate 80 from the coating roll 11. The substrate 80 is transferred on a hot plate 33 and heated in a vacuum drying part 30, and the drying part is evacuated by a vacuum pump 34. Further, the substrate 80 is transferred successively on the hot plates 51a and 51b and a cold plate 52 in a heating and curing part 50, and the coating film is heated, cooled and cured.