| 摘要 |
PROBLEM TO BE SOLVED: To simplify the structure of a polisher head by constituting an air feeder to feed air to a top plate pressing air cylinder so that it can be connected onto a loader while stopping, using a check valve attached to joint mounted on the top plate. SOLUTION: A polisher head 13 comprises a top plate base 22 coupled with the top end of a rotary shaft 16, top plate mounted tightly on the base 22 to rotate together, and air cylinder 35 for pressing the top plate having a wafer sucking surface at the lover face. An air passage 38 for feeding air to the air cylinder 35 is formed on the base 22 and check valve attached to joint 40 is mounted in an entrance opened at the outer surface of the base 22. On a loader an air feeder is disposed which is removably connectable to this joint 40 when the head 13 moves. |
