SYSTEM AND APPARATUS FOR REDUCING ARCING AND LOCALIZED HEATING DURING MICROWAVE PROCESSING

摘要

A system and apparatus for reducing arcing and localized heating as a result of applying microwave energy to a microelectronic substrate having electronic components thereon is provided. The system (10) comprises a microwave furnace (11), means (20) for securing a microelectronic substrate (23) within the chamber (12), and means (30, 30') for electrically interconnecting the microelectronic substrate (23) with a ground (14) connected to an interior wall of the microwave furnace. The apparatus comprises a holder (20) for securing a microelectronic substrate (23) during the application of microwave energy and for providing the necessary electrical connections (30) for grounding components and circuitry thereon. The holder (20) may comprise a heat sink (52) for protection against heat build-up and for maintaining a microelectronic substrate (23) in a substantially flat orientation during microwave processing.