| 摘要 |
PROBLEM TO BE SOLVED: To enable high-speed feedback control by reducing the mass of a cantilever including an axially driving actuator, and also to compensate the defect to be produced by reducing the mass. SOLUTION: In what is called an atomic force microscope in which the probe needle of a cantilever is two-dimensionally scanned near to the sample surface that has been held by a sample table, and the shape of the sample is observed by using a signal that corresponds to the atomic force or distance between the probe needle and the sample surface; a piezoelectric film 7 that has been held between a pair of electrodes 6, 8 is provided on a cantilever 1, and when a signal voltage is applied to the electrodes 6, 8, the piezoelectric film 7 displaces the cantilever 1 in a prescribed direction by means of the d31 inverse piezoelectric effect. |
