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经营范围
发明名称
WAFER FLIP APPARATUS
摘要
申请公布号
KR970000967(B1)
申请公布日期
1997.01.21
申请号
KR19880001178
申请日期
1988.02.09
申请人
PERKIN ELMER CORP.
发明人
WILLIAM, BYERS;PETER, KOCHERSPERGER
分类号
H01L21/677;B65G49/07;B65H5/18;H01L21/683;(IPC1-7):H01L21/68
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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