| 摘要 |
PROBLEM TO BE SOLVED: To surely analyze mass even if the number of mass measurement points is decreased by setting only the indication mass number corresponding to the mass number determined from the correlative relationship between a known substance mass number and the indication mass number of a mass analyzer as mass measurement points. SOLUTION: An analysis sample 15 is carried into a chamber 1 and is placed on a sample placement stand 3, exhaust is continued even after the pressure in an analysis room 9 reaches a desired value, and a monitor gas where, for example, the type and mass of a substance are known, is introduced into the chamber 1. Pressures in the chamber 1 and in the analysis room 9 reach 5×10<-9> Torr and 2.1×10<-9> Torr, respectively, by introducing the gas. Then, a mass measurement point inputted to a mass spectrograph 10 is increased from 1 in steps of 0.1 for mass spectrometry. Then, the indication mass number of the mass spectrograph 10 is read from the peak value of spectrum, substance is specified from the relative position of spectrum, and the indication mass number corresponding to the mass number is determined from the correlation relationship between the mass number and the indication mass number of a specific substance. The mass spectrograph 10 sets only the indication mass number as the mass measurement point and performs the mass spectrometry of an unknown substance.
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