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经营范围
发明名称
COMPOSITE POLISHING CLOTH
摘要
申请公布号
JPH0922886(A)
申请公布日期
1997.01.21
申请号
JP19950192658
申请日期
1995.07.06
申请人
DISCO ABRASIVE SYST LTD
发明人
TAKEUCHI MASAYA
分类号
B24D7/14;B24D13/14;H01L21/304;(IPC1-7):H01L21/304
主分类号
B24D7/14
代理机构
代理人
主权项
地址
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