发明名称 |
THIN FILM SOLAR BATTERY AND ITS MANUFACTURING METHOD |
摘要 |
PURPOSE: To provide a excellent thin film solar battery and its manufacturing method causing no warping at all due to the difference in the thermal expansion coefficient even if a solar battery material is formed on a different kind of substrate. CONSTITUTION: The crystals formed as continuous layers on a substrate 10 are grown through the intermediary of mask layers 13 having many holes 12 juxtaposed at specific intervals so that insular crystals 16 swelling up from the insides of respective holes 12 of the mask layers 13 may be formed in the state not in contact with the other insular crystals 16. |
申请公布号 |
JPH0918033(A) |
申请公布日期 |
1997.01.17 |
申请号 |
JP19950161216 |
申请日期 |
1995.06.27 |
申请人 |
DAIDO HOXAN INC |
发明人 |
YOKOYAMA TAKASHI;YAMAMOTO KAZUMA;MISHIMA TAKAHIRO;MATSUDA TAKESHI |
分类号 |
H01L21/205;H01L21/203;H01L21/208;H01L31/04 |
主分类号 |
H01L21/205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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