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发明名称
33V ZOKUKAGOBUTSUNO KISOSEICHOHO
摘要
申请公布号
JPS5166774(A)
申请公布日期
1976.06.09
申请号
JP19740140853
申请日期
1974.12.06
申请人
NIPPON ELECTRIC CO
发明人
WATANABE HISATSUNE
分类号
C30B25/02;C23C16/30;C30B29/40;H01L21/205
主分类号
C30B25/02
代理机构
代理人
主权项
地址
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