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发明名称
FORMATION OF BPSG FILM
摘要
申请公布号
JPH0917781(A)
申请公布日期
1997.01.17
申请号
JP19960028788
申请日期
1996.02.16
申请人
GENDAI DENSHI SANGYO KK
发明人
YU KEISHIYOKU
分类号
H01L21/3205;C03C27/00;C03C27/04;H01L21/3105;H01L21/316;H01L21/768;(IPC1-7):H01L21/316;H01L21/320
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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