| 摘要 |
<p>PURPOSE: To improve the yield by recovering substance to be processed, according to the processing situation, and enabling the reuse of the substance to be processed, when the drive of each device stops during processing. CONSTITUTION: When the drive during processing stops, an alarm 9 indicates its stop, and a sensor 50 detects the processing condition of a semiconductor wafer W during stop of drive, and also a mapping sensor 15 detects the state of existence or nonexistence of the semiconductor wafer within a container 6a for carriage out and a container 6b for recovery. An unprocessed semiconductor wafer W is carried into a container 6a for carriage out and a processed semiconductor wafer W into a container 6b for recovery by driving CPU 8, based on the signals of the sensor 50 and the mapping sensor 15, and driving a carrier 4 and a main arm 10, based on the signal from the CPU 8.</p> |
