| 摘要 |
PURPOSE: To provide an aluminum nitride circuit board which can obtain stable circuit operation by restraining lowering of a resistance value involved in production of AlOOH. CONSTITUTION: This aluminum nitride circuit board is constituted by forming a metallized layer 2 on an aluminum nitride board 1. A projection 5 from 1nm or more to 500nm or less high is formed in a surface 1a of the aluminum nitride board 1 except a formation region of the metallized layer 2 in the range from at least one to at most 100000 per division in at least one division when the surface 1a of the aluminum nitride board 1 is an aggregate of divisions of 100μm<2> , for example. |
