发明名称 THERMAL INK JET PRINTHEAD WITH PRE-DICED NOZZLE FACE AND METHOD OF FABRICATION THEREFOR
摘要 A plurality of thermal ink jet printheads, each with nozzles in a pre-diced nozzle face, obtained from sectioning of an etched channel wafer aligned and mated with a heating element containing wafer that have a patterned thick film layer sandwiched therebetween. The printhead nozzles and pre-diced nozzle face are produced in the channel wafer prior to the alignment and mating of the wafers by the combination of dicing a notch in the channel wafer through one end of a plurality of sets of etched channel grooves, forming the nozzles and the nozzle face in the channel wafer and photodelineating the thick film layer on the heating element wafer, so that when the wafers are mated, the delineated edge of the thick film layer becomes part of the nozzles without requiring the cutting of the thick film layer by a dicing blade. In one embodiment, the heating element wafer has a similar notch diced therein adjacent the delineated edge of the thick film layer prior to mating with the channel wafer. The two notches are confrontingly aligned and the mated wafers are sectioned into separate printheads by dicing through the aligned notches, so that the dicing blade is spaced from the printhead nozzle faces.
申请公布号 CA2047804(C) 申请公布日期 1997.01.14
申请号 CA19912047804 申请日期 1991.07.24
申请人 XEROX CORPORATION 发明人 FISHER, ALMON P.
分类号 B41J2/16;(IPC1-7):B41J2/16 主分类号 B41J2/16
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