| 摘要 |
<p>PURPOSE: To form an insulating film free from defects by adopting a constitution to dissolve a high-purity gas easily soluble in water in ultra-pure water at an adjusted dissolution rate while controlling the specific resistance value of an electrolytic soln., thereby keeping supplying the always fresh electrolytic soln. to the oxidation vessel of an anodic oxidation device, thereby effecting anodic oxidation. CONSTITUTION: This anodic oxidation device has an anode 1, a cathode 2, the oxidizing vessel 4 filled with the electrolytic soln. 3 of the ultra-pure water and a DC power source 5. A gas cylinder 6, a gas filter 7 and a valve 9 are arranged at a gas inflow route for sending carbon dioxide to an electrolytic producing pipe 9. A valve 8 is connected to a controller which controls the specific resistance value of carbonated water. The carbon dioxide and the ultra-pure water are brought into contact with each other via a hydrophobic membrane 10 disposed in the producing pipe 9, by which the dissolution rate of the carbon dioxide and the ultra-pure water is controlled. A gas outflow section 11 which is the drain of the gas from the gas producing pipe 9 is disposed and after dissociation is executed between the producing pipe 9 and a specific resistance measuring instrument 13, the specific resistance measurement of the carbon dioxide is executed and thereafter, the electrolytic soln. 3 is supplied to the oxidizing vessel 4.</p> |
