| 摘要 |
PURPOSE: To provide a radiation sensitive coating compsn. ensuring satisfactory coatability and less liable to foam. CONSTITUTION: In a radiation sensitive coating compsn. contg. a base resin, a radiation sensitive compd. and a solvent, a solvent contg. a compd. represented by the formula is used as the solvent and a nonionic fluorine-contg. surfactant is also contained. In the formula I, each of R<1> -R<3> is optionally halogen-substd. methyl or ethyl and R<4> is H, optionally halogen-substd. methyl or ethyl. |
