| 摘要 |
PURPOSE: To fix an angular speed sensor, which uses a piezoelectric body as a vibrator, in an object to be measured without any deterioration in SN ratio for detection signal. CONSTITUTION: The angular speed sensor is provided with a vibrator 4, which is constructed of a piezoelectric body single body, and fixing member 6, which is arranged between the vibrator 4 and an object M to be measured so as to fix the vibrator 4 to the object M to be measured, while the fixing member 6 is provided with a connecting part 32, which is connected to the bottom face of the vibrator 4 so as to be vibrated with the vibrator 4, and a small diameter part 34, which is positioned in the vibration center of the vibrator 4 and is formed to be provided with a diameter narrower than the width of the vibrator 4. Since the fixing member 6 is made of an easily machinable metal and the small diameter part 34 can be formed with higher precision in comparison with machining in the vibrator 4 made of a piezoelectric body, deterioration in a balance of vibration in the vibrator 4 can be avoided, and vibration in the vibrator 4 can be stabilized with less vibration leakage since the vibrator 4 is fixed in an approximately constant position by the small diameter part 34 during its vibration. |
