发明名称 SEMICONDUCTOR MEMORY AND ITS PREPARATION
摘要 <p>PROBLEM TO BE SOLVED: To provide a semiconductor memory device using a TFT having a simple structure by reducing the ruggedness of cells, and a method for manufacturing the memory device. SOLUTION: An SRAM containing a thin film transistor is provided with a first gate electrode 49 formed on the channel area of a substrate transistor and the channel area 53 of the thin film transistor formed on the side wall of the electrode 49 with a second gate insulating film 51 in between. Therefore, the succeeding wiring process of the formed SRAM can be performed easily, because the SRAM has a simpler structure than the prior art SRAM has and is less in ruggedness.</p>
申请公布号 JPH098238(A) 申请公布日期 1997.01.10
申请号 JP19960141689 申请日期 1996.06.04
申请人 SAMSUNG ELECTRON CO LTD 发明人 KIN KEITETSU
分类号 H01L27/10;H01L27/11;H01L29/04;H01L29/78;H01L29/786;(IPC1-7):H01L27/10 主分类号 H01L27/10
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