Verfahren zur Herstellung von Formeinsätzen

摘要

The invention pertains to a process for manufacturing mould inserts by galvanic deposition of a metal (7) in hollow cavities (5, 6) in electrically insulating material overlaid on a conducting substrate (1), and subsequent parting of the galvanically deposited metal (7) from the substrate (1) and other structures. The aim of the invention is to adapt the process in such a way as to facilitate the production of mould inserts which are both of complex three-dimensional shape and provided with very fine structures. This is achieved by the deposition on an electrically conducting substrate (1) of an electrically insulating layer (2) which cannot be structured by the subsequent lithographic operation, followed by deposition of an electrically insulating layer (4) which can be structured in the subsequent lithographic operation. The sample thus produced is then structured by precision techniques and the lithographically structurable layer (4) undergoes lithographic structuring.