Pressure sensor having reduced hysteresis and enhanced electrical performance at low pressures

摘要

A pressure sensor suitable for sensing low pressure environments. The pressure sensor includes a piezoresistive sensing element enclosed within a protective housing, and utilizes an insert molded into the housing for supporting the sensing element and concentrating stresses within the housing at a maximum distance from the sensing element. The insert is adapted to work in cooperation with a constraint to isolate the sensing element from stresses within the housing, so as to improve the electrical performance of the sensing element to low pressure environments, such as an evaporative emission system of an automobile.