| 摘要 |
PURPOSE: To enable the surface and inside surface of a porous object having pores in its inside to be modified easily and uniformly by introducing active species in a plasma generated by applying high fequency/high voltage to the object placed between electrodes in a pressurized reactive gas. CONSTITUTION: The surface and inside pore surfaces of a porous obiect 4 are modified by placing a voltage-applying electrode 2 for applying voltage, a conductor for preventing arc discharge during applying voltage, and an earth electrode together with the object 4 placed between both the electrodes in a treating chamber 10, introducing a reactive gas from a reactive-gas-introducing port 1 into the chamber 10, applying high-frequency/high voltage from a high-frequency power source 8 through a connection joint 9 and the voltage-applying electrode 2 to the object 4 kept in tight contact with a conductor 3 to generate a high-density plasma, and sucking and leading active species occurring in the plasma through a gas-permeable support 11, which is in contact with the underside of the object 4 and supports it, from a hollow section 20 to a reactive gas exhaust port 12. |
