| 摘要 |
PURPOSE: To obtain a laminate which is free from distortion such as warpage and has improved antireflection properties, water repellency, and scratch resistance by applying a specific condensation compsn. to a substrate, leaving it in an atmosphere with a controlled humidity and then in an atmosphere with controlled temp. and humidity, and exposing it to an excited glow-discharge plasma of a fluorine-atom-contg. gas. CONSTITUTION: A condensation compsn. (A) comprising 1mol of a tetraalkoxysilane represented by the formula: Si(OR)4 (wherein R is a 1-5C alkyl), 2-8mol of a basic water having a pH of 10.0-12.0, and 10-30mol of an org. solvent is mixed with a condensation compsn. (B) comprising 1mol of a tetraalkoxysilane represented by the formula: Si(OR<1> )4 (wherein R<1> is a 1-5C alkyl), 3-8mol of an acidic water having a pH of 0-2.6, and 10-30mol of an org. solvent in a wt. ratio of A/B of 0.4-2.4. The resulting composite compsn. is mixed with 0.1-2mol of an alkylalkoxysilane represented by the formula: R<2> n Si(OR<3> )4-n (wherein R<2> and R<3> are each a 1-5C alkyl; and n is 1, 2, or 3). Thus obtd. compsn. is applied to a substrate, kept in an atmosphere with a relative humidity of 70% or higher and then in an atmosphere with a relative humidity of 70% or higher at 60 deg.C or higher, and exposed to an excited glow-discharge plasma of a fluorine-atom- contg. gas under a pressure of 1×10<-4> -10<2> Torr. |
