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发明名称
METHOD OF MANUFACTURING A CAPACITOR NODE FOR SEMICONDUCTOR MEMORY DEVICE
摘要
申请公布号
KR960016838(B1)
申请公布日期
1996.12.21
申请号
KR19910019800
申请日期
1991.11.08
申请人
NEC KK.
发明人
YAMANAKKA, KOJI
分类号
H01L27/04;H01L21/822;H01L21/8242;H01L27/10;H01L27/108;(IPC1-7):H01L27/108
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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