发明名称 |
Thin-film vapor deposition apparatus |
摘要 |
A thin-film vapor deposition apparatus has a reaction chamber for holding therein a substrate in an atmosphere isolated from an ambient atmosphere. For depositing a thin film on the substrate, the temperature of an inner wall of the reaction chamber is adjusted to control the temperature of the atmosphere in the reaction chamber, and the temperature of the substrate is also adjusted independently of the temperature of the atmosphere in the reaction chamber, while the substrate is being rotated at a high speed in the reaction chamber. Reactant gases required to deposit a thin film on the substrate are ejected from a reactant gas ejector head toward the substrate in the reaction chamber. Remaining and excessive gases are discharged out of the reaction chamber. <IMAGE> |
申请公布号 |
EP0748881(A1) |
申请公布日期 |
1996.12.18 |
申请号 |
EP19960109620 |
申请日期 |
1996.06.14 |
申请人 |
EBARA CORPORATION |
发明人 |
SHINOZAKI, HIROYUKI;FUKUNAGA, YUKIO;MURAKAMI, TAKESHI;TSUKAMOTO, KIWAMU |
分类号 |
C23C16/458;C23C16/46;C30B25/10;C30B25/12 |
主分类号 |
C23C16/458 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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