Feedthrough glass-to-metal seal repair process

摘要

The process includes removing the lid from the leaking hybrid microcircuit header (21). The header is then placed on a vacuum source (22) and a vacuum is formed on the header (23). A flow of helium is directed over the seals (24) to verify the presence and location of leaks in the seals. A high vacuum sealant, formed of a silicone resin having a low vapor pressure, is applied (25) to each of the leaking glass-to-metal seals while the hybrid microcircuit header is exposed to the vacuum in order to form resealed leads. A flow of helium over the resealed leads is used (26) to confirm that the header is sealed. The header is removed (27) from the vacuum source. The header is finally cured (28) at a temperature of 150 +/- 10 deg. C to create a permanent seal.