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经营范围
发明名称
Apparatus for the angular resolving optical inspection of a sample
摘要
申请公布号
EP0573950(B1)
申请公布日期
1996.12.11
申请号
EP19930109169
申请日期
1993.06.08
申请人
CARL ZEISS JENA GMBH
发明人
RUDOLPH, GUENTER
分类号
G01B11/30;(IPC1-7):G01B11/30;G01B5/00
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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