发明名称 SUCTION TYPE LOCKING DEVICE
摘要 <p>PURPOSE: To hold a workpiece surely in securing an airtight space even in the case where a contact surface of a porous seat with this workpiece is flawed by interposing this porous seat, having a curved surface form being almost accorded with a curved surface of the workpiece, on the contact surfaces between a support member and the workpiece. CONSTITUTION: A porous seat 1 is used after being interposed on a contact surface with a workpiece. This porous seat 1 is formed into a curved surface form being almost accorded with a curved surface of the workpiece 6. This porous seat consists of thermoplastics of polyethylene, polypropylene, polytetrafluoroethylene, polyvinyliden fluoride, polyvinylchloride, polyamide, polyester, ultrahigh molecular weight polyethlene, ultrahigh molecular weight polypropylene, ultrahigh molecular weight polyvinylchloride, ultra molecular weight polyamide or the like. With this porous seat used, the curved surface is enclosed with a surface and thereby the workpiece 6 is suckedly supportable.</p>
申请公布号 JPH08323572(A) 申请公布日期 1996.12.10
申请号 JP19950193993 申请日期 1995.05.30
申请人 NITTO DENKO CORP 发明人 KAWAMURA KAZUNORI;TACHIBANA TOSHIMITSU;NAGAI YOZO;MORIYAMA JUNICHI
分类号 B23Q3/08;H01L21/68;H01L21/683;(IPC1-7):B23Q3/08 主分类号 B23Q3/08
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