| 摘要 |
PURPOSE: To obtain a high density uniform aluminum nitride sintered compact having high heat conductivity and excellent in surface smoothness by adding an Lu-contg. compd. as a sintering aid to aluminum nitride as a principal component and firing them. CONSTITUTION: An Lu compd. or the Lu compd. and one or more kinds of compds. of group IIIa elements of the Periodic Table other than Lu are added as a sintering aid to aluminum nitride as a principal component by 0.3-3mol% in total (expressed in trems of oxides of the group IIIa elements) and they are mixed so as to give a compsn. in which the molar ratio (RE2 O3 /Al2 O3 ) of the total amt. of the group IIIa elements (RE) [expressed in terms of oxides (RE2 O3 )] to the amt. of oxygen as an impurity [expressed in terms of alumina (Al2 O3 )] exceeds 0.6. The resultant. powdery mixture is compacted in a desired shape and fired at 1,600-2,000 deg.C in a nonoxidizing atmosphere to obtain the objective aluminum nitride sintered compact. |
