发明名称 |
Brush cleaning apparatus and cleaning system for disk-shaped objects using same |
摘要 |
A brush cleaning apparatus which includes at least one brush cleaning means having a pair of rotary brushes that are arranged in parallel one above the other. Disk-shaped objects are transported one at a time between the brushes so as to be cleaned thereby. A stopper is provided in front of the disk-shaped objects. The stopper selectively blocks movement of the disk-shaped objects and releases the disk-shaped objects for controlled movement of the disk-shaped objects through the cleaning apparatus.
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申请公布号 |
US5581837(A) |
申请公布日期 |
1996.12.10 |
申请号 |
US19950493070 |
申请日期 |
1995.06.21 |
申请人 |
SHIN-ETSU HANDOTAI CO., LTD. |
发明人 |
UCHIYAMA, ISAO;NAKANO, MASAMI;TAKAMATU, HIROYUKI;SUZUKI, MORIE |
分类号 |
B08B1/04;B08B1/02;B08B3/02;H01L21/00;H01L21/304;(IPC1-7):A47L25/00;A46B13/02 |
主分类号 |
B08B1/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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