发明名称 Brush cleaning apparatus and cleaning system for disk-shaped objects using same
摘要 A brush cleaning apparatus which includes at least one brush cleaning means having a pair of rotary brushes that are arranged in parallel one above the other. Disk-shaped objects are transported one at a time between the brushes so as to be cleaned thereby. A stopper is provided in front of the disk-shaped objects. The stopper selectively blocks movement of the disk-shaped objects and releases the disk-shaped objects for controlled movement of the disk-shaped objects through the cleaning apparatus.
申请公布号 US5581837(A) 申请公布日期 1996.12.10
申请号 US19950493070 申请日期 1995.06.21
申请人 SHIN-ETSU HANDOTAI CO., LTD. 发明人 UCHIYAMA, ISAO;NAKANO, MASAMI;TAKAMATU, HIROYUKI;SUZUKI, MORIE
分类号 B08B1/04;B08B1/02;B08B3/02;H01L21/00;H01L21/304;(IPC1-7):A47L25/00;A46B13/02 主分类号 B08B1/04
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