| 摘要 |
In an optical inspecting apparatus, first, a sample is illuminated with light. Then, an optical element causes light reflected from the sample or light transmitted through the sample to be focused, to thereby permit same to pass through an aperture stop arranged on a back focal plane or in its vicinity of the optical element. A telecenttic system converts the light having passed through the aperture stop into a parallel light. An image on the air formed by the telecentric system is viewed for inspection of the sample surface.
|
