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发明名称
Verfahren und Gerät zum Einschätzen der Ioneneinpflanzungsdosierungshöhen und Halbleitern
摘要
申请公布号
DE69029027(D1)
申请公布日期
1996.12.05
申请号
DE19906029027
申请日期
1990.12.05
申请人
THERMA-WAVE, INC. (N.D.GES.D. STAATES DELAWARE), FREMONT, CALIF., US
发明人
OPSAL, JON, LIVERMORE, CALIFORNIA 94550, US
分类号
H01S3/00;G01N21/17;G01R31/308;H01L21/66;(IPC1-7):G01N21/17
主分类号
H01S3/00
代理机构
代理人
主权项
地址
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