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发明名称
Magnetron-Zerstäubungsvorrichtung und Dünnfilm-Beschichtungsverfahren
摘要
申请公布号
DE69305725(D1)
申请公布日期
1996.12.05
申请号
DE19936005725
申请日期
1993.11.30
申请人
HONEYWELL INC., MINNEAPOLIS, MINN., US
发明人
COLE, BARRETT E., BLOOMINGTON, MN 55431, US
分类号
C23C14/35;C23C14/50;H01J37/34;H01L21/673;(IPC1-7):H01J37/34;H01L21/00
主分类号
C23C14/35
代理机构
代理人
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地址
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