发明名称 NETHOD FOR FORMING MINUTE STRUCTURE AND ELECTRONIC DEVICE MADE BY THIS METHOD
摘要 PURPOSE: To form ideal potential barriers on both sides of the first crystal by growing the first crystal having the small forbidden band gap directly on the step of the surface of a solid-state sample, and growing other crystals with out bonding on both sides of the above described crystal. CONSTITUTION: A step 2 having the height of an atom layer is present on a (111) surface 1 of Si, which is to become a substrate. When Ge is evaporated on the surface with the substrate temperature being kept at 250-350 deg.C, the Ge forms a crystal structure 3 directly on the step 2. When Si is supplied on the surface with the substrate temperature being kept at 350-800 deg.C at the next time, the Si forms the crystal structure toward the terrace at the lower side from the part right beneath the step 2 toward the terrace. When the Ge is supplied on the surface with the substrate temperature being kept at 250-350 deg.C furthermore, the Ge forms a crystal structure 5 directly on the step edge of the terrace 4.
申请公布号 JPH08316140(A) 申请公布日期 1996.11.29
申请号 JP19950114268 申请日期 1995.05.12
申请人 HITACHI LTD 发明人 HASEGAWA TAKESHI;HOSOKI SHIGEYUKI;DOI TAKAHISA;KONO MAKIKO;TOMIMATSU SATOSHI
分类号 H01L29/06;H01L21/20;(IPC1-7):H01L21/20 主分类号 H01L29/06
代理机构 代理人
主权项
地址