| 摘要 |
PROBLEM TO BE SOLVED: To provide a focal plane array for hybrid thermal image forming system employing a multilayer heterolayer including a relatively thick pyroelectric thin film layer and a method for fabricating a focal plane array at low cost utilizing members effectively. SOLUTION: A hybrid thermal image forming system 20 generally comprises a focal plane array 30, a thermal isolation structure 50, and an integrated circuit board 60. The local plane array 30 comprises a heat-sensitive element 42 formed of pyroelectric thin film layer of barium titanate strontium(BST) for example. The heat-sensitive element 42 can be coupled, on one side thereof, with a contactor pad 62 arranged on the integrated circuit board 60 through the mesa strip conductor 56 of thermal isolation structure 50 and, on the other side thereof, with an electrode 36. Various devices on the focal plane array 30 can be fabricated of a multilayer heterolayer formed on a carrier substrate. |
