| 摘要 |
PURPOSE: To make it possible to inexpensively and easily produced high polymer flexible optical waveguide films which have sufficient flexibility, are low in loss and highly reliable in a large quantity by producing lower clads on a metal mold having projecting parts, removing the metal mold on a flat substrate, arranging core materials into grooves and further, covering these grooves with a clad material. CONSTITUTION: The clad material 2 is applied on the metal mold substrate 1 having a desired waveguide shape and is dried. The film of this clad material 2 is peeled from the metal mold 1 and is stuck onto the substrate 3 having good flatness. The core material 4 having a refractive index higher than the refractive index of the clad material 2 is applied thereon and is dried. The excess core polymers swelling out from the waveguide groove parts are removed by using ions 5 for dry etching. The clad material 6 is applied thereon and dried in such a manner that the core parts are covered. The high polymer waveguides are thereafter peeled from the substrate 3, by which the flush type waveguides are obtd. in a film-like flexible state. Further, the waveguides having the increased bending strength are obtainable as well by sticking the high polymers having excellent flexibility to both sides of the waveguides. |
