| 摘要 |
PURPOSE: To provide a mechanism for confirming presence/absence of a work which prevents the damage of a processing jig by precisely confirming the presence/absence of a work, and can be formed in a simple structure at low cost and in a space-saving manner. CONSTITUTION: This mechanism is used to confirm the presence/absence of a work on a processing jig 1 to be arranged in a vacuum container 7, a pair of contactors 3a and 3b are opposed to the work-placing surface 1a of the processing jig 1, and the presence/absence of the work is confirmed by the conductivity generated by the contact of the conductive work to the pair of the contactors 3a and 3b. |
