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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH08306688(A)
申请公布日期
1996.11.22
申请号
JP19950105412
申请日期
1995.04.28
申请人
SANYO ELECTRIC CO LTD
发明人
AOYAMA MASASHIGE
分类号
H01L21/302;H01L21/265;H01L21/3065;H01L21/3205;H01L23/52;(IPC1-7):H01L21/320;H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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