SCANNING PROBE MICROSCOPE AND OPTICAL MICROSCOPE

摘要

PURPOSE: To provide a scanning probe microscope and an optical microscope which enable the positioning of a probe at a higher accuracy with respect to a sample. CONSTITUTION: This apparatus is provided with a cantilever 19 subjected to a fluorescent treatment, a SPM device 27 adapted to perform an SPM measurement of a sample 25 on a stage 23 using the cantilever 19 and a lighting device 35 capable of emitting exciting light with a specified wavelength. A specified fluorescent image is generated from the cantilever 19 and the sample 25 by the exciting light from the lighting device 35 to be displayed in an observation field of view of an eyepiece 51.