发明名称 Verfahren und Vorrichtung zur Naßbehandlung von Substraten in einem Behälter
摘要 Proposed is a method for wet-processing substrates in a vessel into which a liquid is fed and is removed again through an overflow device. The method is particularly simple to carry out if the overflow device floats on the liquid and descends and/or rises as the liquid surface descends and/or rises. No mechanical devices are needed to raise the substrates and remove them from the liquid. Also proposed are devices for the wet-processing of substrates by the method proposed.
申请公布号 DE19517573(A1) 申请公布日期 1996.11.14
申请号 DE1995117573 申请日期 1995.05.12
申请人 STEAG MICROTECH GMBH DONAUESCHINGEN, 78166 DONAUESCHINGEN, DE 发明人 DENZLER, LUDWIG, 75210 KELTERN, DE;HARMS-JANSSEN, HELMUTH, 75038 OBERDERDINGEN, DE
分类号 B08B3/04;B01D21/24;H01L21/00;H01L21/304;H01L21/306;(IPC1-7):B01J4/00;B01J19/00;B01J16/00;C25D21/00;C23G5/00;C23F1/00 主分类号 B08B3/04
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