Phase grating and method of fabricating a phase grating
摘要
Phase lattice comprises two spaced reflection layers (2,4)arranged on both sides of a transparent spacer layer (3). The reflection layer (2) is formed as a permanent layer and the reflection layer (4) formed as an amplitude lattice. The novelty is that the spacer layer (3) is provided between parallel facing regions of both reflection layers (2,4) and forms bars which form edges diagonal to the reflection layers (2,4). The refractive index is different on both sides of the edge. Prodn. of the phase lattice is also claimed.
申请公布号
EP0742455(A1)
申请公布日期
1996.11.13
申请号
EP19950105584
申请日期
1995.04.13
申请人
DR. JOHANNES HEIDENHAIN GMBH
发明人
SPECKBACHER, PETER, DR.;FLATSCHER, GEORG, DR.;ALLGAEUER, MICHAEL;BAYER, ERICH;SPANNER, ERWIN;FRANZ, ANDREAS, DR.