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发明名称
METAL WIRING OF SEMICONDUCTOR DEVICE AND MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH08298287(A)
申请公布日期
1996.11.12
申请号
JP19950127214
申请日期
1995.04.26
申请人
RICOH CO LTD
发明人
IRINODA MITSUGI
分类号
H01L23/52;H01L21/3205;H01L21/768;H01L23/522;(IPC1-7):H01L21/768;H01L21/320
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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