发明名称 SEMICONDUCTOR DEVICE MANUFACTURE AND SEMICONDUCTOR USING IT
摘要 PURPOSE: To eliminate use of a molding die for package molding by scanning while irradiating with light energy with a specified spot diameter to scan at an energy level which is necessary for setting a photosetting composition and forming a photosetting composition in a silicon element or a part of a silicon element and an outer lead. CONSTITUTION: A photosetting composition 8 is brought into contact with a silicon wafer 6 wherein an electrical circuit is formed or a silicon chip and an outer lead. A set matter of the photosetting composition 8 is formed in a sealing part and a periphery thereof by light energy irradiation of a spot diameter of at most 1000μm as a sealing layer. That is, a container is filled with the photosetting composition 8 with fluidity and photosetting energy irradiates a sealing part in a composition. Spot light with a fine spot diameter scans a surface of the photosetting composition 8 by an arbitrary pattern in this way. The pattern can be readily created by changing strength and scanning velocity, etc., of light energy.
申请公布号 JPH08293509(A) 申请公布日期 1996.11.05
申请号 JP19950096513 申请日期 1995.04.21
申请人 HITACHI LTD 发明人 ISHII TOSHIAKI;NAGAI AKIRA;EGUCHI KUNIYUKI;SEGAWA MASANORI;KOKADO HIROYOSHI;OGINO MASAHIKO;MOGI AKIRA
分类号 H01L23/28;H01L21/56 主分类号 H01L23/28
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