| 摘要 |
PURPOSE: To provide a physical quantity detection device wherein high integration is possible and adjustment is easy. CONSTITUTION: This device comprises a sensor element 16 wherein a moving part is provided and the voltage signal Vin corresponding to displacement of the moving part is outputted and position control of the moving part is possible by control voltages V1 and V2, and an A/D converter 20 digitizing the voltage signal Vin into digital data Da for outputting. This device also comprises a control circuit 22, which sets controlled variable Do for controlling a position of the moving part based on the digital data Da, and, with pulse width modulation signal PT generated according to the controlled variable Do, generates the control voltages V1 and V2 through a switching circuit 18, for position- controlling the moving part of the sensor element 16. Since anything other than the sensor element 16 consists of a digital circuit, high integration is possible, and, since the voltage signal Vin is digitized and the controlled variable Do is found by calculation process of the digital value, offset and adjustment of sensitivity are simply performed. |
