发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 <p>PURPOSE: To improve the reliability of the inner lead bonding (ILB) in a multi- pin IC chip with 700 or more electrodes. CONSTITUTION: Inner leads 3 are aligned and superposed on a bump electrode 2, and after they are thermocompression bonded using a gang bonding jig 22 and they are tacked, each connecting point is permanently connected successively by heating using the ultrasonic vibration applied to a point bonding jig 23 and a bonding stage 21.</p>
申请公布号 JPH08293530(A) 申请公布日期 1996.11.05
申请号 JP19950096465 申请日期 1995.04.21
申请人 NEC CORP 发明人 YAMASHITA TSUTOMU
分类号 H01L21/603;H01L21/60;H01L21/607;H01L23/12;H01L23/48;(IPC1-7):H01L21/603 主分类号 H01L21/603
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