| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing method of a thin film actuated mirror array which can prevent a phenomenon that an elastic part sticks to an active matrix when rinsing liquid is removed. SOLUTION: A substrate 212 and an active matrix 210 having an array of M×N pieces of connecting terminals 214 and an array of M×N pieces of transistors are prepared, and a thin film sacrifice layer 224 is formed on the active matrix 210, and an array of M×N pairs of empty slots to surround the connecting terminals 214 is formed, and an elastic layer 230 is formed, and an array of M×N pieces of conducits 226 is formed, and a second thin film layer 240, a deformable layer 250 and a first thin film layer 260 are formed on the elastic layer 230, and the first thin film layer 260, the deformable layer 250, the second thin film layer 240 and the elastic layer 230 are patternized until the thin film sacrifice layer 224 is exposed, and a thin film protective layer 270 to completely cover an upper surface and a side surface of an array of respective actuated mirrors is formed, and the thin film sacrifice layer 224 is removed by using an etching liquid, and the etching liquid is washed away by using a rising liquid, and after the rising liquid is removed, the thin film protective layer 270 is removed.</p> |
