| 摘要 |
PURPOSE: To provide an optical device for polarization analysis and the polarization analysis device using the optical device by which the azimuth and ellipticity of the ellipically polarized beam can be accurately measured at a high speed. CONSTITUTION: The coherent light beams 5 emitted from a light source 11 are branched into two ways by means of a beam splitter 31, and one light beams are further divided by a polarized wave beam splitter 29 into perpendicular polarized wave surface components, and the light frequencies of the respective light beams are shifted by▵1 and▵F2 by means of light frequency shifters 301 and 302 , and they are totally reflected by light reflecting plates 321 and 322 respectively, and then synthesized into a reference light beam 6. The other light beams are made circularly polarized light beams 8 by means of a circular polarization light converter 12 and irradiates a DUT 4, and the transmitted light beams 9 thereof and the reference light beams 6 are superposed on a beam splitter 311 , and the synthesized light beams 10 are converted into an electric signals by a photodetector 23, and are separated by band-pass filters 351 , 352 , and processed and then subjected to polarization analysis.
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