PROCESS AND APPARATUS FOR THE TREATMENT OF SEMICONDUCTOR WAFERS IN A FLUID,申请号EP19940929958-传众专利搜索

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发明名称	PROCESS AND APPARATUS FOR THE TREATMENT OF SEMICONDUCTOR WAFERS IN A FLUID
摘要
申请公布号	EP0739252(A1)	申请公布日期	1996.10.30
申请号	EP19940929958	申请日期	1994.09.22
申请人	LEGACY SYSTEMS, INC.	发明人	MATTHEWS, ROBERT, ROGER
分类号	B08B3/04;B08B3/08;H01L21/00;H01L21/304;H01L21/306;(IPC1-7):B08B3/00;B08B3/12;B08B5/00;B08B7/02	主分类号	B08B3/04
代理机构		代理人
主权项
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