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发明名称
VACUUM TREATING DEVICE
摘要
申请公布号
JPH08283930(A)
申请公布日期
1996.10.29
申请号
JP19950116279
申请日期
1995.04.17
申请人
NISSIN ELECTRIC CO LTD
发明人
NAKAMURA NOBUHIKO
分类号
F16K3/00;B01J3/03;C23C14/00;C23C14/56;C23C16/44;C23C16/455;H01L21/203;H01L21/285;(IPC1-7):C23C14/00
主分类号
F16K3/00
代理机构
代理人
主权项
地址
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