发明名称 Semiconductor device with a semiconductor element provided in a mesa structure
摘要 A semiconductor device includes a semiconductor body (1) having a semiconductor element with connection points (2, 3) which adjoins a surface (4) of the semiconductor body (1) and is laterally insulated and surrounded by a first depression (5) in the surface (4), which depression (5) is provided with a wall (6) and a bottom (7), while the surface (4) of the semiconductor body (1) and the wall (6) and bottom (7) of the depression (5) are covered with an insulating layer (8). The connection points (2, 3) are provided in the insulating layer (8) on the surface (4) of the semiconductor body (1) and are connected to conductor tracks (10, 11) which connect the connection points (2, 3) across a wall (6) to connection surfaces (12, 13) associated with the connection points (2, 3) and situated on the bottom (7). It is found in practice that, in the case of progressive miniaturization, the manufacture of such devices leads to rejects caused by short-circuits between connection surfaces (12, 13). According to the invention, one or several further depressions (50) surrounded by the first depression (5) is/are present in the surface (4) of the semiconductor body (1), while only one connection surface (12, 13) is present on the bottom (7, 57) of each of the first and further depressions (5, 50), which connection surface is connected to a connection point (2, 3) on the surface (4) of the semiconductor body (1) via a conductor track (10, 11). Short-circuits are found to take place in the known semiconductor devices on a wall (6) of the depression (5) when there are more than one conductor tracks (10, 11) on this wall (6). Here, however, only one conductor track (10 or 11) is present on the wall (6, 56 of the depression (5, 50), so short-circuits with other conductor tracks on the wall (6, 56) cannot arise.
申请公布号 US5569952(A) 申请公布日期 1996.10.29
申请号 US19940316304 申请日期 1994.09.30
申请人 U.S. PHILIPS CORPORATION 发明人 DEKKER, RONALD;MAAS, HENRICUS G. R.;GRAVESTEIJN, DIRK J.;VERSLEIJEN, MARTINUS P. J. G.
分类号 H01L29/41;H01L21/331;H01L21/60;H01L23/482;H01L29/73;H01L29/732;(IPC1-7):H01L23/50;H01L29/417;H01L29/70 主分类号 H01L29/41
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